for mother apply super visa, you will need to meet LICO requirement and get medical insurance for mother.
1. open IRCC portal
2. select super visa
3. Fill in the form
4. attach your financials and make sure you meet LICO requirments.
5. attach other docs from mother side, like if she av ties at home country, show them. like property, job, business, family memebers etc.
6. if you want to represent her, (means you are filling her forms etc) fill representative form and sign it.
7. pay the fee and submit the application
8. wait for biometric letter *usually it comes next day
9. book vfs appointment and send mother for biometric at vfs
10. wait for medical request
11. get medical done
12. wait for result
13. once passport request come, book appointment vfs and submit original passport
14. get visa stamp, book ticket and fly.
i hope i could roughly explain the steps.